Development status and trend of the hottest micro

The development status and trend of micromachining technology and its key technologies

micromachining technology concept after the extension meter is clamped on the sample

micromachining or micro electromechanical system or micro system is a collection of micro mechanisms, micro sensors, micro actuators, signal processing and control circuits, and even the interface according to the estimated maximum load Communication circuit and power supply are integrated micro devices or systems. Its main features are: small size (characteristic size range: 1 m-10mm), light weight, low energy consumption, stable performance; It is conducive to mass production and reduce production costs; Small inertia, high resonance frequency and short response time; Intensive high-tech achievements with high added value. The purpose of micro machinery is not only to reduce the size and volume, but also to search for components and systems with new principles and functions through miniaturization and integration, so as to open up a new technical field and form a mass industry

micro machining technology refers to the micro machining technology as a mechanical device. The emergence and development of microfabrication have long been closely related to large-scale integrated circuits. Integrated circuits require that more electronic components can be accommodated on micro area semiconductors to form complex and perfect circuits. The minimum line width in the circuit micro pattern is the key technical symbol to improve the integration of integrated circuits. For the microelectronic industry, micro machining is an advanced manufacturing technology for manufacturing micro sized components or thin die graphics with machining scales ranging from micron to nanometer. At present, micromachining technology is mainly based on silicon plane machining and bulk machining technology developed from semiconductor integrated circuit micromachining technology. After the mid-1980s, Liga machining (micro mold electroplating process), quasi Liga machining, ultra micro machining, micro EDM, plasma beam machining, electron beam machining Considerable progress has been made in micro machining processes such as rapid prototyping (RPM) and bonding technology

micro mechanical systems can complete tasks that large electromechanical systems cannot. The close combination of micro machinery and electronic technology will lead to the emergence of a wide variety of micro devices. These micro devices are made of large quantities of ultra-high performance lightweight materials that combine ceramics and graphene perfectly. They are cheap and will be widely used in many fields of human life. It can be expected that in this century, micro machinery will gradually move from laboratory to application, which will have a significant impact on the development of industry and agriculture, information, environment, biomedicine, space, national defense and other fields. Micro machining technology is a very important and active technology field in the field of micro machinery technology. Its development can not only drive the development of many related disciplines, but also is closely related to the development of national science and technology, economy and national defense construction. The development of micro machining technology has a huge industrial application prospect

-- foreign development status of micro machining technology

in 1959, Richard P Feynman (winner of the 1965 Nobel Prize in Physics) put forward the idea of micro machinery. In 1962, the first silicon micro pressure sensor came out, and micromachines such as gears, gear pumps, pneumatic turbines and connectors with a size of 50 ~ 500 m were developed. In 1965, Stanford University developed silicon brain electrode probe, and later succeeded in scanning tunneling microscope and micro sensor. In 1987, the University of California at Berkeley developed a silicon micromotor with a rotor diameter of 60 ~ 12 m, showing the potential of using silicon micromachining technology to manufacture small movable structures and compatible with integrated circuits to manufacture micro systems

micromachines have been highly valued by government departments, business circles, colleges and research institutions abroad. In the late 1980s, 15 scientists from MIT, Berkeley, stanfordat and T in the United States put forward the national proposal for the report on micro mechanics, an emerging field. They claimed that due to the urgency of micro mechanics (micro system) in the United States, they should be ahead of other countries in the competition in such a new and important technical field. They suggested that the central government should advance $50million in five years, It has been valued by the leading institutions of the United States, has made continuous and vigorous investment, and has taken aerospace, information and MEMS as the three major priorities of scientific and technological development. NASA invested US $100million to develop the discovery microsatellite. The National Science Foundation of the United States took MEMS as a newly emerging research field and formulated a plan to fund the research of micro electromechanical systems. Since 1998, it has funded eight universities including MIT, the University of California and Bell Laboratories to engage in research and development in this field. The annual funding increased from 1 million and 2 million to 5 million US dollars in 1993. The report of the technology plan of the US Department of defense released in 1994 lists MEMS as a key technology project. The advanced research projects agency of the U.S. Department of defense actively leads and supports MEMS Research and military applications. A MEMS standard process line has been established to promote the research and development of new components/devices. American industry is mainly committed to the research of sensors, displacement sensors, strain gauges, accelerometers and other sensor related fields. Many institutions have participated in the research of micro mechanical systems, such as Cornell University, Stanford University, the University of California, Berkeley, the University of Michigan, the University of Wisconsin, the old renzdmore national research, etc. The Berkeley sensor and actuator Center (BSAC) of the University of California, with a funding of 15million yuan from the Ministry of defense and more than a dozen companies, has established a 1115m2 ultra clean laboratory for research and development of MEMS

Japan's Ministry of trade and industry started a 10-year, 25 billion yen micro large-scale research program in 1991 to develop two prototypes, one for medical treatment, diagnosis and micro surgery into the human body, and the other for industry to repair micro cracks in aircraft engines and atomic energy equipment. Dozens of units including Tsukuba University, Tokyo Institute of technology, Tohoku University, Waseda University and Fujitsu Research Institute participated in the program

European industrial developed countries have also successively made major investments in the research and development of micro systems. Germany has started the ten-year micro processing program since 1988. Its Ministry of science and technology allocated 40000 marks from 1990 to 1993 to support the research of Micro Systems program, and listed micro systems as the focus of scientific and technological development at the beginning of this century. Liga process, which was first created in Germany, provides a new technical means for the development of MEMS, It has become the preferred process for the fabrication of three-dimensional structures. France launched a 70million Franc microsystem and technology project in 1993. The European community forms a multifunctional microsystem research network nexus, which jointly coordinates the research of 46 research institutes. Switzerland has also invested in the development of MEMS based on its traditional watch manufacturing industry and small precision machinery industry, with an investment of US $10million in 1992. The British government has also formulated a nanoscience plan. Eight projects are listed for research and development in the fields of machinery, optics, electronics and so on. In order to strengthen the power of developing MEMS in Europe, some European companies have formed MEMS development groups

at present, a large number of micro machines or micro systems have been studied. For example, micro tweezers with a tip diameter of 5 m can hold a red blood cell, a micro pump with a size of 7mm, 7mm and 2mm, a car with a flow rate of 250 l/min, a mechanical butterfly flying in a magnetic field, and a micro inertial unit (MIMU) integrating micro speedometer, micro gyroscope and signal processing system. Germany created Liga process, and made cantilever beam, actuator, micro pump, micro nozzle, humidity, flow sensor and various optical devices. Caltech pastes a considerable number of 1mm micro beams on the wing surface of the aircraft to control its bending angle to affect the aerodynamic characteristics of the aircraft. Silicon accelerometers produced in large quantities in the United States integrate micro sensors (mechanical parts) and integrated circuits (electrical signal sources, amplifiers, signal processing and correction circuits, etc.) on a silicon chip within 3mm. The micro lathe developed in Japan with a few centimeters square can process micro shafts with an accuracy of 1.5 m

-- concept of micro machining technology

micro machining or micro electromechanical system or micro system is a micro device or system that can only be manufactured in batch, and integrates micro mechanisms, micro sensors, micro actuators, signal processing and control circuits, even peripheral interfaces, communication circuits and power sources. Its main features are: small size (characteristic size range: 1 m-10mm), light weight, low energy consumption, stable performance; It is conducive to mass production and reduce production costs; Small inertia, high resonance frequency and short response time; Intensive high-tech achievements with high added value. The purpose of micro machinery is not only to reduce the size and volume, but also to search for components and systems with new principles and functions through miniaturization and integration, so as to open up a new technical field and form a mass industry

micro machining technology refers to the micro machining technology as a mechanical device. The emergence and development of microfabrication have long been closely related to large-scale integrated circuits. Integrated circuits require that more electronic components can be accommodated on micro area semiconductors to form complex and perfect circuits. The minimum line width in the circuit micro pattern is the key technical symbol to improve the integration of integrated circuits. For the microelectronic industry, micro machining is an advanced manufacturing technology for manufacturing micro sized components or thin die graphics with machining scales ranging from micron to nanometer. At present, micromachining technology is mainly based on silicon plane machining and bulk machining technology developed from semiconductor integrated circuit micromachining technology. After the mid-1980s, Liga machining (micro mold electroplating process), quasi Liga machining, ultra micro machining, micro EDM, plasma beam machining, electron beam machining Considerable progress has been made in micro machining processes such as rapid prototyping (RPM) and bonding technology

micro mechanical systems can complete tasks that large electromechanical systems cannot. The close combination of micro machinery and electronic technology will lead to the emergence of a wide variety of micro devices. These micro devices will be widely used in many fields of human life because of their low price and mass integrated manufacturing. It can be expected that in this century, micro machinery will gradually move from laboratory to application, which will have a significant impact on the development of industry and agriculture, information, environment, biomedicine, space, national defense and other fields. Micro machining technology is a very important and active technology field in the field of micro machinery technology. Its development can not only drive the development of many related disciplines, but also is closely related to the development of national science and technology, economy and national defense construction. The development of micro machining technology has a huge industrial application prospect

-- foreign development status of micro machining technology

in 1959, Richard P Feynman (winner of the 1965 Nobel Prize in Physics) put forward the idea of micro machinery. In 1962, the first silicon micro pressure sensor came out, and micromachines such as gears, gear pumps, pneumatic turbines and connectors with a size of 50 ~ 500 m were developed. In 1965, Stanford University developed silicon brain electrode probe, and later succeeded in scanning tunneling microscope and micro sensor. In 1987, the University of California at Berkeley developed the rotor straight